| Deposition chamber Varian vacuum
evaporator PS10E ● Internal Dimensions Glass Bell (DxH): 300 mm x 300 mm; ● Diameter of substrate carrier: 60 mm; ● Vacuum pumping system Vac Torr 150; ● Substrate Heating system. |
 |
| NATIONAL INSTITUTE for
LASER,
PLASMA and RADIATION PHYSICS LABORATORY of SOLID-STATE QUANTUM ELECTRONICS |
|
| Deposition chamber Varian vacuum
evaporator PS10E ● Internal Dimensions Glass Bell (DxH): 300 mm x 300 mm; ● Diameter of substrate carrier: 60 mm; ● Vacuum pumping system Vac Torr 150; ● Substrate Heating system. |
|
| Laboratory of Solid-State Quantum Electronics |